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Precision Vibration Isolation Systems
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Stage-Base™ 450
with STACIS® inside

Stage-Base 450 image with Stainless, and callouts

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Active Vibration and Motion Cancellation for Increased Throughput

TMC continues to apply advancing technology to develop new solutions to the challenging demands that semiconductor tools place on their vibration isolation systems. Stage-Base™ 450 is the next generation in active hard-mount piezoelectric vibration cancellation integrating voice coil technology. Only TMC can offer this unique serial-type technology for advanced low frequency vibration cancellation with voice coil motors (VCM) for aggressive moving- stage motion cancellation.

Stage-Base 450 is specifically designed to be the primary vibration cancellation system for advanced semiconductor tools which incorporate high-precision motorized X-Y stages. DC 2020 high speed digital controllerWhile such tools require extremely efficient vibration cancellation, just as critical, they require that payload motion induced by the stage to settle very quickly to maximize tool throughput. Building on the STACIS® iX Stage-Base, this next generation active control system incorporates TMC’s STACIS® technology to achieve extreme vibration cancellation using piezo-electric actuators and a stiff suspension in a serial-type architecture. This results in floor vibration isolation starting at 0.6Hz unmatched in the industry with significantly less initial deflection in response to stage forces. With the addition of VCM with feed-forward control for even faster settling time to further increase throughput, the result is the most advanced Active Vibration and Motion Cancellation system for moving stage applications.