STACIS® iX – Active Piezoelectric Vibration Cancellation

  • SEM-Base® VI

    TMC’s SEM-Base® is an active vibration cancellation floor platform designed for use specifically with scanning electron microscopes. Designed to support all commercial SEM or similar SEM-type instruments on any lab floor, SEM-Base® is the ideal solution to bring your lab to within the microscope’s vibration criteria.

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  • LaserTable-Base™

    TMC’s LaserTable-Base™ combines air and STACIS®, into one integrated cancellation system. The upper, pneumatic portion of LaserTable-Base™ is modular and interchangeable. It can incorporate TMC’s Gimbal Piston™ Air Isolators, MaxDamp® Air Isolators, or even rigid, non-isolating supports, depending on the application requirement.

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  • Stage-Base™

    TMC’s Stage-Base™ 450 is specifically designed to be the primary vibration cancellation system for advanced semiconductor tools which incorporate high-precision motorized X-Y stages. With the addition of VCM with feed-forward control for even faster settling time to further increase throughput, the result is the most advanced Active Vibration and Motion Cancellation system for moving stage applications.

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